Program

The Benelux Meeting 2020 will host the following renowned invited speakers:

Kristin Pettersen

Professor, Department of Engineering Cybernetics, NTNU, Trondheim, Norway 

 

Thomas Schön

Professor, Department of Information Technology, Uppsala University, Uppsala, Sweden 

 

Ming Cao

Professor, Faculty of Science and Engineering, University of Groningen, Groningen, The Netherlands 

 

Marcel Heertjes

Principle engineer and control competence leader at ASML
Professor, Department of Mechanical Engineering, TU Eindhoven, Eindhoven, The Netherlands

Title: Hybrid Integrator-Gain Systems: How to use them in Motion Control of Wafer Scanners?

Abstract: Wafer scanners, whose list prices range from several tens to hundreds of millions of euros, are key tools in the production of microchips. They consist of highly-complex mechatronic systems that combine high throughput with high precision. Modern wafer scanners expose 200-300 wafers per hour, each wafer containing over a hundred fields, where each field possibly contains a large processor or memory chip. The motion systems of wafer scanners are controlled (often with nanometer precision) by a combination of feedforward and feedback controls, the latter mainly referring to PID control. Though PID control is experienced as being intuitive, simple, and effective, its frequency-domain robust control design faces inherent design limitations. Also, in time-domain, associated overshoot and settling times that may negatively impact machine performance measures like overlay and throughput, are only to some extent overcome by feedforward control. To deal with these limitations, recent developments with hybrid integrator-gain system will be discussed. Topics to be addressed are: rigorous robust control design, easy and non-conservative frequency-domain tools for stability analysis, proofs and insights on the possibilities for HIGS to beat linear designs, practical tuning rules, and experimental demonstrations of HIGS control designs on industrial wafer stage systems.

Short biography: Marcel Heertjes is part-time professor on nonlinear industrial control for high-precision mechatronics at the department of mechanical engineering at Eindhoven University of Technology. His primary affiliation is with ASML. He served as guest editor of International Journal of Robust and Nonlinear Control (2011) and IFAC Mechatronics (2014) and is currently associate editor of IFAC Mechatronics (since 2016). He is (co-)recipient of the IEEE Control Systems Technology award (2015) for variable gain control and its applications to wafer scanners. His main research interests are nonlinear control, feedforward and learning control, and data-driven optimization of high-precision systems.